SOLID SiC, which has been developed by our unique technology, is a super high purity SiC made by Chemical Vapor Deposition process.

  • Super High Purity
  • Excellent Chemical Resistance
  • Very little metal diffusion
  • No Outgassing
  • Theoretical Density ( -SiC)
  • Wafer Carriers
  • Susceptors, Dummy Wafer
  • Guide Rings
  • Parts for Etching Process
  • CVD Process, etc.